Basic Info.
Constituent
Industrial Pure Air
Grade Standard
Industrial Grade
Chemical Property
Non-Flammable Gas
Product Name
Nitrogen Trifluoride
Cylinder Standard
DOT/ISO/GB
Cylinder Pressure
15MPa/20MPa
Appearance
Colorless, Odorless
Transport Package
Cylinder
Product Description
Product Description
NF3 gas refers to nitrogen trifluoride in its gaseous state. Nitrogen trifluoride (NF3) is a colorless, odorless gas at room temperature and pressure. It is stable and does not react with most common materials. NF3 gas is commonly used in various industrial applications, particularly in the electronics and semiconductor industries.
As mentioned earlier, NF3 gas is used as a cleaning agent in the electronics manufacturing industry to remove residues from silicon wafers, chambers, and other electronic components. It is also employed as a plasma etchant in the semiconductor industry for selectively removing materials during the fabrication process. Additionally, NF3 is used in the production of thin-film photovoltaic cells for solar panels and as a fluorinating agent in chemical reactions.
When working with NF3 gas, it is important to follow appropriate safety measures to ensure personal safety and prevent environmental impact. This includes working in well-ventilated areas or using exhaust systems to prevent the buildup of high concentrations of NF3 gas. Proper protective equipment should be used, including gloves, goggles, and respiratory protection if necessary. NF3 gas should not be released into the environment, and efforts should be made to monitor and reduce emissions due to its high global warming potential.
Overall, NF3 gas plays a significant role in various industries, particularly in the electronics and semiconductor sectors, due to its cleaning and etching properties. However, it is crucial to handle and use NF3 responsibly, following safety guidelines to protect both human health and the environment.
DOT Class | 2.2 & 5.1 | Un Number | Un 2451 |
Cylinder Standard | DOT/ISO/GB | Cylinder Pressure | 15MPa/20MPa |
Valve | Diss640 | Melting Point | -206.79 ºC |
Appearance | Colorless, Odorless | Boiling Point | -129.0 ºC |
Density | 2.96 Kg/M3 | Molecular Weight | 146.05 |
Transport Package | 47L, 440L | Specification | 99.99%, 99.996% |
Trademark | CMC | Origin | China |
HS Code | 28129011 | Production Capacity | 5000tons/Year |
Product Parameters
Product Name | Nitrogen trifluoride NF3 |
Chemical Formula | NF3 |
Hazard Class | 2.2 |
Molecular Weight | 71.002 |
Boiling Point (ºC) | -129.05 |
CAS | 7783-54-2 |
Density(kg/m³) | 3.015 |
Process: |
Nitrogen trifluoride is prepared by the direct fluorination of ammonia. It may also be obtained by electrolysis of molten ammonium bifluoride or by direct combination of the elements nitrogen and fluorine using an electrical discharge at low temperatures. |
Specification: |
Cylinder: 44L Valve: CGA640 Content:20kg Cylinder: 440L Valve: CGA640 Content:200kg ISO-20ft Valve: CGA640 Content:4000kg ISO-40ft Valve: CGA640 Content:8000kg |
Application: |
Nitrogen trifluoride is used |
1. as a high-speed, selective etchant in silicon processing. It has been used to etch silicon, polysilicon, silicon nitride and silicon oxide as well as refractory metals and silicides |
2. to in-situ tube cleaning |
3. as a nitrogen source gas for nitride deposition |
4. as the fluorine source in HF/DF chemical lasers |
5. as a fluorinating agent |
6. for fiber treatment |
Emergency Measures:Signal word: Danger Detailed Photos
FAQ
Q: What is the min order?
A: Different products have different min orders. It depends on the kind the gas and the cylinder specifications. Please feel free to contact me directly for your requirement.
Q: What is the package & storage details?
A: Seamless steel cylinder with different valves, or as to your requirement.
Stored in the shady, cool, dry, ventilated warehouse, and keep away from sunlight and ramming.
Q: Shall we send back the cylinders to China to refill the gas again?
A: Yes, when you ordered our cylinders, next time, you can send back the cylinders to fill gas again. You just need to tell us before you export. We will handle all the import customs clearance formalities.
Q: What are your company's main sales products?
A: We mainly supply electronics specialty gas and mixtures needed by the electronics industry, such as NH3, SiH4, C4F8, O2, CF4, CO2, TEOS, etc.
Q: How to ensure the quality of your products?
A: We have passed the ISO 9001:2015 quality management system certification and ISO 14001:2015 environmental management system certification.
Q: How do you ship the product?
A: Usually we ship products by ocean shipping
Q: What is your advantage over other competitors?
A: We are a factory with excellent equipment and a high-quality control system, and our factory price is more competitive, fast shipment with high quality.
We have a full-time after-sales service providing solutions to various problems. After-sales service engineers standby 24 hours a day, and respond to customer needs when necessary at the first time.
Address:
Building 1, No. 688, Qiushi Road, Jinshanwei Town, Jinshan District, Shanghai, China
Business Type:
Manufacturer/Factory
Business Range:
Chemicals
Company Introduction:
Shanghai Kemike Chemical Co., Ltd is a professional company devoted to the development of semiconductor chemical vapor deposition materials. It sells all kinds of advanced CVD/ALD (Chemical Vapr Deposition/Atomic Layer Depostion) chemical vapor deposition materials. It provides high-tech advanced materials companies from the front [synthesis, purification, analysis] process integration to the back [filling and packaging, container manufacturing, technical services]. Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative, reliable, and safe. Contact us today to discuss your needs and to find out how we can help you.
Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry. We supply cylinder gas, electronic gas, etc., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine, etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative, reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCl, N2O, doping mixed gas (TMB, pH3, B2H6) and other electronic gases.