Precursor Gas in The CVD Surface Treatment Applications Cylinder Gas Tungsten Hexafluoride

• CAS No.: 7783-82-6
• Formula: Wf6
• EINECS: 232-029-1
• Constituent: Industrial Pure Air
• Grade Standard: Industrial Grade
• Chemical Property: Combustion-Supporting Gas
• Model NO.: Wf6
• Product Name: Tungsten Hexafluoride
• Einecs No: 7783-82-6
• Un No: Un2196
• Purity: 99.999%
• DOT Class: 2.3
• Appearance: Colorless
• Transport Package: 200t/Year
• Specification: 200t/Year
• Trademark: CMC
• Origin: China
• HS Code: 2812190091
• Production Capacity: 200t/Year

Product Description

Product Description

Tungsten hexafluoride (WF6) is a compound composed of tungsten (W) and fluorine (F) atoms. It is a highly reactive and corrosive gas that is commonly used in various industrial applications.

Properties of Tungsten Hexafluoride (WF6) Gas:

• Formula: WF6
• Molecular weight: 297.84 g/mol
• Appearance: Colorless to pale-yellow gas
• Odor: Sharp and pungent
• Melting Point: -2.5 °C (-12.5 °F)
• Boiling Point: 17.1 °C (62.8 °F)
• Density: 3.53 g/cm³ (at 25 °C or 77 °F)
• Solubility: Reacts violently with water, decomposes into tungsten oxide and hydrofluoric acid
• Vapor Pressure: 1 atm at approximately 19 °C (66 °F)

Uses of Tungsten Hexafluoride (WF6) Gas:

1. Semiconductor Manufacturing: WF6 is commonly used in the semiconductor industry for the chemical vapor deposition (CVD) process. It is utilized as a precursor to deposit thin layers of tungsten on silicon wafers during the production of microelectronic devices.

2. Metal Organic Chemical Vapor Deposition (MOCVD): WF6 is employed in MOCVD processes to deposit thin films of tungsten for various applications, including the production of light-emitting diodes (LEDs) and thin-film solar cells.

3. Surface Treatment: Tungsten hexafluoride is also used for surface treatment applications. It can be employed as a reactive gas in plasma etching processes to selectively remove certain materials from surfaces, such as silicon dioxide, silicon nitride, and polysilicon.

Safety Considerations:
Tungsten hexafluoride is a highly reactive and corrosive substance. It should be handled with extreme caution, preferably by trained personnel, in a well-ventilated area or under fume hoods. Contact with skin, eyes, or mucous membranes should be avoided, as it can cause severe burns and tissue damage. Inhalation of WF6 gas or its decomposition products can be harmful and should be prevented. Proper personal protective equipment, including gloves, goggles, and respiratory protection, should be used when working with this compound.

Please note that the information provided here is based on general knowledge, and specific safety guidelines and protocols may vary depending on the location and application. It is crucial to consult the relevant safety data sheets (SDS) and follow the instructions provided by the manufacturer or regulatory authorities when handling tungsten hexafluoride or any other hazardous substances.

Product Spec:
Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6

EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:
 

Test items	Units	Quality requirements	Test results
CF4	ppm	<0.5	<0.01
O2	ppm	<0.5	<0.01
N2	ppm	<1	0.03
CO	ppm	<0.5	<0.02
CO2	ppm	<0.5	<0.01
SiF4	ppm	<0.5	<0.1
SF6	ppm	<0.5	<0.1
HF	ppm	<5	0.19
Al	ppb	≤10	<0.020
As	ppb	≤10	<0.001
B	ppb	≤10	<0.005
Ca	ppb	≤5	<0.200
Cd	ppb	≤2	<0.001
Cr	ppb	≤10	<0.020
Fe	ppb	≤10	<0.007
K	ppb	≤5	<0.100
Mn	ppb	≤10	<0.001
Na	ppb	≤5	<0.040
Th	ppb	≤0.1	<0.001
Ti	ppb	≤10	<0.002
Li	ppb	≤10	<0.002
U	ppb	≤0.05	<0.001
Zn	ppb	≤10	<0.005
Si	ppb	≤10	<0.100
Pb	ppb	≤10	<0.001
P	ppb	≤2	<0.300
Mg	ppb	≤10	<0.020
Ni	ppb	≤20	<0.030
Cu	ppb	≤5	<0.005
Mo	ppb	≤10	<0.001
Total impurities of other metal	ppb	≤500	<0.0010

 

Detailed Photos

 

 

Company Profile

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.

Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.

Our Advantages

1. Fast delivery;
2. Stable raw material source;
3. On-line analysis system for quality control in every step;
4. High requirement and meticulous process for handling cylinder before filling;
Our carbon monoxide have been exported to many countries like India, Pakistan, Malaysia, Indonesia, Australia, Singapore, Maldives and Ecuador.
Since the establishment of our company, it has received universal praise by virtue of good reputation, high quality and perfect after service.

FAQ

1. Q: Are you a factory or a trading company?
  A: We are a manufacture and trade integration company. Expert R&D department and sophisticated supply chain is our key of success.

2. Q: Are bulk orders and multiple product orders available?
  A: Yes, we have a strong production supply system to make sure all of your requirements satisfied. One station product solution is our aim of service.

3. Q: What if I never imported this product before, how do I do it?
  A: Don't worry. We have import and export experience with over 50 countries over the world, our fulfillment department will guide you every step of the process.
4.  What is the MOQ?
Different products have different min order. It's depends on the kind the gas and the cylinder specifications. Please feel free to contact with me directly for your requirement.

5. Q: Why choice us Kemike Gas ?
  A: Stable Supply, Professional Solution, Reasonable Price, and Safety Business with our Taiyu.

6. Q: 3. How does your factory do the quality control?
  A: We have standard quality control procedure.
a> In production, we have quality analysis system to make sure each step is qualified.
b> Before filling, we do the pre-treatment for the cylinders to clean well.
c> After filling, we will do 100% inspection analyze before delivery.

7. Q:Is it possible to ship by air?
  A:Gases are classified into class 2.1, class 2.2 and class 2.3 which are inflammable gas, non-flammable gas and poisonous gas. According to regulation, inflammable gas and poisonous gas cannot be shipped by air, and only non-flammable gas can be transported by air. If the amount purchased is large, sea transportation is better.

8. Q:Can I customize the package?
  A:Yes of course! The most regular package is cylinder. Its size, color, valve, design and other requirements can all be met.  

9. Q: What is the package & storage details?
  A:Seamless steel cylinder with different valves, or as to your requirement.
Stored in shady, cool, dry, ventilated warehouse, and keep away from sunlight and ramming.

10. More question......
Feel free to contact us, you will get immediately reply.