Chemical Vapor Deposition Atomic Layer Deposition Semiconductor Industry Usage Wf6 Tungsten Hexafluoride

• CAS No.: 7783-82-6
• Formula: Wf6
• EINECS: 232-029-1
• Constituent: Industrial Pure Air
• Grade Standard: Electronic Grade
• Chemical Property: Poisonous Gases
• Model NO.: Wf6
• Product Name: Tungsten Hexafluoride
• Transport: by Sea
• Appearance: Colorless
• Purity: 99.999%
• Transport Package: Sea Transportation
• Specification: 10L 40L 50L
• Trademark: CMC
• Origin: China
• HS Code: 2812190091
• Production Capacity: 200t/Year

Product Description

Product Description

Tungsten hexafluoride (WF6) is a chemical compound consisting of one tungsten atom bonded to six fluorine atoms. It is a colorless gas at room temperature and has a pungent odor. Tungsten hexafluoride is highly reactive and is primarily used in various industrial processes, particularly in the semiconductor industry.

Here are some key properties and applications of tungsten hexafluoride:

Properties:

1. Formula: WF6
2. Molar mass: 297.84 g/mol
3. Appearance: Colorless gas
4. Melting point: -2.8°C (-27.04°F)
5. Boiling point: 17.1°C (62.78°F)
6. Density: 2.4 g/cm³ (at 25°C)

Applications:

1. Chemical Vapor Deposition (CVD): Tungsten hexafluoride is commonly used in the CVD process to deposit thin films of tungsten onto surfaces, such as silicon wafers, to create electrical contacts or interconnects in microelectronics.

2. Atomic Layer Deposition (ALD): WF6 is utilized in ALD processes to deposit tungsten films with precise thickness and uniformity in semiconductor manufacturing.

3. Tungsten Source: It serves as a precursor for the production of pure tungsten metal through reduction processes.

4. Etching: Tungsten hexafluoride is also used as an etchant in the semiconductor industry to selectively remove tungsten layers during the fabrication of integrated circuits.

Due to its reactivity and potential hazards, tungsten hexafluoride should be handled with caution. It is corrosive to many materials, reacts violently with water, and can release toxic hydrogen fluoride gas upon contact with moisture. Proper safety protocols and equipment must be followed when working with this compound.

Basic Info.

Model NO.	WF6	Transport Package	Cylinder
Specification	10L/15kg	Trademark	CMC
Origin	Suzhou, China	HS Code	2812190091
Production Capacity	200t/Year

 

Product Spec:

ungsten Hexafluoride WF6 GAS 
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade


The COA of Product:
 

Test items	Units	Quality requirements	Test results
CF4	ppm	<0.5	<0.01
O2	ppm	<0.5	<0.01
N2	ppm	<1	0.03
CO	ppm	<0.5	<0.02
CO2	ppm	<0.5	<0.01
SiF4	ppm	<0.5	<0.1
SF6	ppm	<0.5	<0.1
HF	ppm	<5	0.19
Al	ppb	≤10	<0.020
As	ppb	≤10	<0.001
B	ppb	≤10	<0.005
Ca	ppb	≤5	<0.200
Cd	ppb	≤2	<0.001
Cr	ppb	≤10	<0.020
Fe	ppb	≤10	<0.007
K	ppb	≤5	<0.100
Mn	ppb	≤10	<0.001
Na	ppb	≤5	<0.040
Th	ppb	≤0.1	<0.001
Ti	ppb	≤10	<0.002
Li	ppb	≤10	<0.002
U	ppb	≤0.05	<0.001
Zn	ppb	≤10	<0.005
Si	ppb	≤10	<0.100
Pb	ppb	≤10	<0.001
P	ppb	≤2	<0.300
Mg	ppb	≤10	<0.020
Ni	ppb	≤20	<0.030
Cu	ppb	≤5	<0.005
Mo	ppb	≤10	<0.001
Total impurities of other metal	ppb	≤500	<0.0010

 

Detailed Photos

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.

Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.

Q: What is the min order?
A: Different products have different min orders. It depends on the kind the gas and the cylinder specifications. Please feel free to contact me directly for your requirement.

Q: What is the package & storage details?
 A: Seamless steel cylinder with different valves, or as to your requirement.
Stored in the shady, cool, dry, ventilated warehouse, and keep away from sunlight and ramming.

Q: Shall we send back the cylinders to China to refill the gas again?
A: Yes, when you ordered our cylinders, next time, you can send back the cylinders to fill gas again. You just need to tell us before you export. We will handle all the import customs clearance formalities.

Q: What are your company's main sales products?
A: We mainly supply electronics specialty gas and mixtures needed by the electronics industry, such as NH3, SiH4, O2, CF4, CO2, TEOS, etc.

Q: How to ensure the quality of your products?
A: We have passed the ISO 9001:2015 quality management system certification and ISO 14001:2015 environmental management system certification.

Q: How do you ship the product?
A: Usually we ship products by ocean shipping

Q: What is your advantage over other competitors?
A: We are a factory with excellent equipment and a high-quality control system, and our factory price is more competitive, fast shipment with high quality.
We have a full-time after-sales service providing solutions to various problems. After-sales service engineers standby 24 hours a day, and respond to customer needs when necessary at the first time.
 
Q: What is the min order?
 A: Different products have different min orders. It depends on the kind the gas and the cylinder specifications. Please feel free to contact me directly for your requirement.

Q: What is the package & storage details?
 A: Seamless steel cylinder with different valves, or as to your requirement.
Stored in the shady, cool, dry, ventilated warehouse, and keep away from sunlight and ramming.