Precursor Gas Depositing Thin Films of Tungsten Semiconductor Industry Usage Tungsten Hexafluoride

• CAS No.: 7783-82-6
• Formula: Wf6
• EINECS: 232-029-1
• Constituent: Industrial Pure Air
• Grade Standard: Industrial Grade
• Chemical Property: Combustion-Supporting Gas
• Model NO.: Wf6
• Product Name: Tungsten Hexafluoride
• Purity: 99.999%
• Transport: by Sea
• Appearance: Colorless
• Transport Package: 200t/Year
• Specification: 200t/Year
• Trademark: CMC
• Origin: China
• HS Code: 2812190091
• Production Capacity: 200t/Year

Product Description

Product Description

Tungsten hexafluoride (WF6) is a chemical compound composed of one tungsten atom and six fluorine atoms. It is a volatile, colorless, and highly toxic gas. Here are some key points about tungsten hexafluoride:

1. Chemical Formula: WF6
2. Molecular Weight: 297.84 g/mol
3. Physical Properties: Tungsten hexafluoride is a dense gas with a boiling point of 17.1 °C (62.8 °F) and a density of 3.42 g/L at room temperature.
4. Toxicity: WF6 is highly toxic and can cause severe burns, eye damage, and respiratory issues upon inhalation. It is corrosive to most metals and reacts violently with water, moisture, and organic materials.
5. Uses: Tungsten hexafluoride is primarily used in the semiconductor industry for chemical vapor deposition (CVD) processes. It is employed as a precursor in the production of tungsten films and layers on semiconductor wafers. WF6 is also used in the synthesis of other tungsten compounds.
6. Safety Precautions: Due to its toxicity and reactivity, handling tungsten hexafluoride requires strict safety measures. It should only be used in properly equipped and ventilated facilities by trained personnel wearing appropriate protective gear.

Product Spec:

Tungsten Hexafluoride WF6 GAS 
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:
 

Test items	Units	Quality requirements	Test results
CF4	ppm	<0.5	<0.01
O2	ppm	<0.5	<0.01
N2	ppm	<1	0.03
CO	ppm	<0.5	<0.02
CO2	ppm	<0.5	<0.01
SiF4	ppm	<0.5	<0.1
SF6	ppm	<0.5	<0.1
HF	ppm	<5	0.19
Al	ppb	≤10	<0.020
As	ppb	≤10	<0.001
B	ppb	≤10	<0.005
Ca	ppb	≤5	<0.200
Cd	ppb	≤2	<0.001
Cr	ppb	≤10	<0.020
Fe	ppb	≤10	<0.007
K	ppb	≤5	<0.100
Mn	ppb	≤10	<0.001
Na	ppb	≤5	<0.040
Th	ppb	≤0.1	<0.001
Ti	ppb	≤10	<0.002
Li	ppb	≤10	<0.002
U	ppb	≤0.05	<0.001
Zn	ppb	≤10	<0.005
Si	ppb	≤10	<0.100
Pb	ppb	≤10	<0.001
P	ppb	≤2	<0.300
Mg	ppb	≤10	<0.020
Ni	ppb	≤20	<0.030
Cu	ppb	≤5	<0.005
Mo	ppb	≤10	<0.001
Total impurities of other metal	ppb	≤500	<0.0010

 

Detailed Photos

 

Company Profile

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.

Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.

Our Advantages

1. Fast delivery;
2. Stable raw material source;
3. On-line analysis system for quality control in every step;
4. High requirement and meticulous process for handling cylinder before filling;
Our carbon monoxide have been exported to many countries like India, Pakistan, Malaysia, Indonesia, Australia, Singapore, Maldives and Ecuador.
Since the establishment of our company, it has received universal praise by virtue of good reputation, high quality and perfect after service.

FAQ

1. Q: Are you a factory or a trading company?
  A: We are a manufacture and trade integration company. Expert R&D department and sophisticated supply chain is our key of success.

2. Q: Are bulk orders and multiple product orders available?
  A: Yes, we have a strong production supply system to make sure all of your requirements satisfied. One station product solution is our aim of service.

3. Q: What if I never imported this product before, how do I do it?
  A: Don't worry. We have import and export experience with over 50 countries over the world, our fulfillment department will guide you every step of the process.
4.  What is the MOQ?
Different products have different min order. It's depends on the kind the gas and the cylinder specifications. Please feel free to contact with me directly for your requirement.

5. Q: Why choice us Kemike Gas ?
  A: Stable Supply, Professional Solution, Reasonable Price, and Safety Business with our Taiyu.

6. Q: How does your factory do the quality control?
  A: We have standard quality control procedure.
a> In production, we have quality analysis system to make sure each step is qualified.
b> Before filling, we do the pre-treatment for the cylinders to clean well.
c> After filling, we will do 100% inspection analyze before delivery.

7. Q:Is it possible to ship by air?
  A:Gases are classified into class 2.1, class 2.2 and class 2.3 which are inflammable gas, non-flammable gas and poisonous gas. According to regulation, inflammable gas and poisonous gas cannot be shipped by air, and only non-flammable gas can be transported by air. If the amount purchased is large, sea transportation is better.

8. Q:Can I customize the package?
  A:Yes of course! The most regular package is cylinder. Its size, color, valve, design and other requirements can all be met.  

9. Q: What is the package & storage details?
  A:Seamless steel cylinder with different valves, or as to your requirement.
Stored in shady, cool, dry, ventilated warehouse, and keep away from sunlight and ramming.

10. More question......
Feel free to contact us, you will get immediately reply.