a Key Material in The Semiconductor Industry Application Usage Sihcl3 Trichlorosilane

• CAS No.: 10025-78-2
• Formula: Sihcl3
• EINECS: 233-042-5
• Usage: Inorganic Chemical Material
• Status: Liquid State
• Product Name: Trichlorosilane
• Model NO.: Sihcl3
• Pressure: 0.1MPa≤p<1.6MPa
• Model No.: Sihcl3
• Grade: Electron Grade
• Transport: by Sea
• Specification: 40L, 200L
• Trademark: CMC
• Origin: Suzhou, China
• HS Code: 2812190091
• Production Capacity: 1000t/Year

Product Description

Product Description

Trichlorosilane (TCS) is a gas that belongs to the organosilicon compound family. Its chemical formula is HSiCl3, indicating that it consists of one hydrogen atom, one silicon atom, and three chlorine atoms. Trichlorosilane is a colorless, volatile liquid at room temperature but rapidly evaporates to form a gas.

TCS is primarily used in the production of polycrystalline silicon, which is a key material in the semiconductor industry. It serves as a precursor for the deposition of silicon in the chemical vapor deposition (CVD) process. In this process, trichlorosilane is reacted with hydrogen gas at high temperatures to produce high-purity silicon for semiconductor manufacturing.

The CVD process involving trichlorosilane can be summarized as follows:

1. Trichlorosilane gas is mixed with hydrogen gas.
2. The gas mixture is then introduced into a reactor chamber.
3. The temperature inside the chamber is raised to several hundred degrees Celsius.
4. At these elevated temperatures, the trichlorosilane molecules decompose, liberating hydrogen chloride (HCl) gas and leaving behind silicon.
5. The liberated silicon then deposits onto a substrate, such as a silicon wafer, forming a layer of polycrystalline silicon.

Trichlorosilane is highly reactive and requires careful handling due to its corrosive and toxic nature. It should be stored and used in designated areas with appropriate safety measures.

Basic Info.

Model NO.	SiHCl3	Grade Standard	Electron Grade
Transport Package	Canister, Cylinder	Specification	40L, 200L
Trademark	CMC	Origin	Suzhou
HS Code	2812190091	Production Capacity	1000t/Year

Specifications:

Test  items		Unit	Test Result
Components	Purity	%	99.990
	Other CHLOROSILANE	%	0.010
Impurities	Co	ppb	0.01
	Cr	ppb	0.01
	Cu	ppb	0.01
	Fe	ppb	0.06
	Mn	ppb	0.01
	Ni	ppb	0.01
	V	ppb	0.01
	B	ppb	0.01
	Al	ppb	0.01
	P	ppb	0.01
	As	ppb	0.01
	Mo	ppb	0.01
	Total metal impurities	ppb	<1.00
P+As		ppb	0.02
C		ppm	<0.01
Gas Density		/	4.7

Detailed Photos

Company Profile

ShangHai CMC chemical Co.,ltd. is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.

1. Q: Are you a factory or a trading company?
    A: We are a manufacture and trade integration company. Expert R&D department and sophisticated supply chain is our key of success.

2. Q: Are bulk orders and multiple product orders available?
    A: Yes, we have a strong production supply system to make sure all of your requirements satisfied. One station product solution is our aim of service.

3. Q: What if I never imported this product before, how do I do it?
    A: Don't worry. We have import and export experience with over 50 countries over the world, our fulfillment department will guide you every step of the process.

4. Q: What is the MOQ?
    A: Different products have different min order. It's depends on the kind the gas and the cylinder specifications. Please feel free to contact with me directly for your requirement.

5. Q: Why choice us CMC ?
    A: Stable Supply, Professional Solution, Reasonable Price, and Safety Business with our CMC.

6. Q: How does your factory do the quality control?
    A: We have standard quality control procedure.
a> In production, we have quality analysis system to make sure each step is qualified.
b> Before filling, we do the pre-treatment for the cylinders to clean well.
c> After filling, we will do 100% inspection analyze before delivery.

7. Q:Is it possible to ship by air?
    A:Gases are classified into class 2.1, class 2.2 and class 2.3 which are inflammable gas, non-flammable gas and poisonous gas. According to regulation, inflammable gas and poisonous gas cannot be shipped by air, and only non-flammable gas can be transported by air. If the amount purchased is large, sea transportation is better.

8. Q:Can I customize the package?
    A:Yes of course! The most regular package is cylinder. Its size, color, valve, design and other requirements can all be met.  

9. Q: What is the package & storage details?
    A:Seamless steel cylinder with different valves, or as to your requirement.
Stored in shady, cool, dry, ventilated warehouse, and keep away from sunlight and ramming.

10. More question......
Feel free to contact us, you will get immediately reply.