Basic Info.
Constituent
Industrial Pure Air
Grade Standard
Industrial Grade
Chemical Property
Combustion-Supporting Gas
Cylinder Pressure
12.5MPa/15MPa/20MPa
Transport Package
47L/440L/ISO Tank
Specification
47L/440L/ISO Tank
Product Description
Product Description
Silane gas is a colorless, flammable gas with the chemical formula SiH4. It consists of one silicon atom bonded to four hydrogen atoms. Silane is the simplest compound in the silane family, which includes various silicon-hydrogen compounds known as silanes.
Silane gas is primarily used in the semiconductor industry for the deposition of thin films of silicon dioxide (SiO2) and silicon nitride (Si3N4) on silicon wafers. These films are essential for the fabrication of integrated circuits and other electronic devices. Silane is often preferred over other silicon-containing gases because it provides a high-quality and conformal coating on the wafer surface.
The deposition process involves introducing silane gas into a reaction chamber along with other reactive gases, such as oxygen or nitrogen. The silane molecules decompose on the heated surface of the wafer, releasing silicon atoms that react with the other gases to form the desired films. The process is typically carried out in a controlled environment, such as a chemical vapor deposition (CVD) or plasma-enhanced chemical vapor deposition (PECVD) system.
It's important to note that silane gas is highly flammable and can form explosive mixtures with air. Therefore, strict safety measures and handling procedures are necessary when working with silane gas. Proper ventilation, fire suppression systems, and personal protective equipment are essential to minimize the risks associated with its use.
Additionally, silane gas can react vigorously with water or moisture, releasing hydrogen gas and forming silicon dioxide. This reaction is exothermic and can be highly dangerous if uncontrolled. Therefore, storage and handling of silane gas require moisture-free conditions to prevent accidental reactions.
Overall, silane gas plays a crucial role in the semiconductor industry for the deposition of thin films, but its handling and use require careful attention to safety protocols due to its flammability and reactivity.
Detailed Photos
Specification:
CAS No.: 7803-62-5
EINECS No.: 232-263-4
UN No.: UN2203
Purity: 99.9999%
Dot Class: 2.1
Appearance: Colorless
Grade Standard: Electronic Grade
Specification | 99.9999% |
Carbon Monoxide | ≤ 0.05 ppm |
Carbon Dioxide | ≤ 0.05 ppm |
Total chloride | ≤ 0.1 ppm |
Methane | ≤ 0.05 ppm |
C2-C4 | ≤ 0.1 ppm |
Nitrogen | ≤ 0.5 ppm |
Oxygen | ≤ 0.05 ppm |
Moisture | ≤ 0.1 ppm |
Silyl Ether | ≤ 0.1 ppm |
Methyl Silane | ≤ 0.1 ppm |
Disilane | ≤ 0.3 ppm |
Hydrogen | ≤ 20 ppm |
Aluminum | ≤ 0.02 ppba |
Antimony | ≤ 0.02 ppba |
Arsenic | ≤ 0.02 ppba |
Gallium | ≤ 0.02 ppba |
Boron | ≤ 0.02 ppba |
Phosphorus | ≤ 0.02 ppba |
Iron + Chromium + Nickel + Copper + Zinc | ≤ 1 ppba |
Packaging & Shipping
Cylinder Specifications | Contents |
Cylinder Capacity | Valve | Weight |
47L | DISS632 | 10 kgs |
440L | DISS632 | 120 kgs |
Company Profile
Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
FAQ
1. Q: Are you a factory or a trading company? A: We are a manufacture and trade integration company. Expert R&D department and sophisticated supply chain is our key of success.2. Q: Are bulk orders and multiple product orders available? A: Yes, we have a strong production supply system to make sure all of your requirements satisfied. One station product solution is our aim of service.3. Q: What if I never imported this product before, how do I do it? A: Don't worry. We have import and export experience with over 50 countries over the world, our fulfillment department will guide you every step of the process.4. What is the MOQ?Different products have different min order. It's depends on the kind the gas and the cylinder specifications. Please feel free to contact with me directly for your requirement.5. Q: Why choice us Taiyu Gas ? A: Stable Supply, Professional Solution, Reasonable Price, and Safety Business with our Taiyu.6. Q: 3. How does your factory do the quality control? A: We have standard quality control procedure.a> In production, we have quality analysis system to make sure each step is qualified.b> Before filling, we do the pre-treatment for the cylinders to clean well.c> After filling, we will do 100% inspection analyze before delivery.7. Q:Is it possible to ship by air? A:Gases are classified into class 2.1, class 2.2 and class 2.3 which are inflammable gas, non-flammable gas and poisonous gas. According to regulation, inflammable gas and poisonous gas cannot be shipped by air, and only non-flammable gas can be transported by air. If the amount purchased is large, sea transportation is better.8. Q:Can I customize the package? A:Yes of course! The most regular package is cylinder. Its size, color, valve, design and other requirements can all be met. 9. Q: What is the package & storage details? A:Seamless steel cylinder with different valves, or as to your requirement.Stored in shady, cool, dry, ventilated warehouse, and keep away from sunlight and ramming.10. More question......Feel free to contact us, you will get immediately reply.
Address:
Building 1, No. 688, Qiushi Road, Jinshanwei Town, Jinshan District, Shanghai, China
Business Type:
Manufacturer/Factory
Business Range:
Chemicals
Company Introduction:
Shanghai Kemike Chemical Co., Ltd is a professional company devoted to the development of semiconductor chemical vapor deposition materials. It sells all kinds of advanced CVD/ALD (Chemical Vapr Deposition/Atomic Layer Depostion) chemical vapor deposition materials. It provides high-tech advanced materials companies from the front [synthesis, purification, analysis] process integration to the back [filling and packaging, container manufacturing, technical services]. Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative, reliable, and safe. Contact us today to discuss your needs and to find out how we can help you.
Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry. We supply cylinder gas, electronic gas, etc., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine, etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative, reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCl, N2O, doping mixed gas (TMB, pH3, B2H6) and other electronic gases.